Optical information processing apparatus

ABSTRACT

An optical information processing apparatus including a substrate of a transparent material, first and second optical waveguides formed on opposite faces of said transparent substrate, a light introducing device for introducing reflected light from an information writing medium into the first and second optical waveguides, and a detecting device for detecting reproduction signal, tracking error signal and focusing error signal based on the reflected light introduced into the first and second optical waveguides.

BACKGROUND OF THE INVENTION

The present invention generally relates to an information processing arrangement and more particularly, to an optical information processing apparatus employing an semi-conductor laser such as an optical disc device or the like.

Following recent remarkable developments in the information field, optical disc devices capable of recording and reproducing information in a large capacity have been put into actual applications. Such optical disc devices include those for compact discs, video discs, additionally-writing type optical discs, or rewritable magneto-optical discs. The optical pick-up portion or optical head which is the most essential portion of such optical disc device. Miniaturization and reduction in weight of the pick-up have been attempted through utilization of techniques in micro-optics owing to the necessity for high speed access and stabilization. However, since conventional optical heads employ bulk-type optical elements (analyzer, beam splitter, prism, lens and the like), there has been a limit to the achievable amounts of reduction in size thereof.

Therefore, various proposals have been recently made for such size reduction of the optical head. One proposal relates to an optical head for the magneto-optical disc which utilizes a waveguide type differential detection device (as disclosed in Institute of Electronics, Information and Communication Engineers (IEICE) magazine OQE 88-177, written by Sunagawa et al.)

The known optical head as referred to above is schematically shown in FIG. 1.

The waveguide type differential detection device in FIG. 1 includes a PYREX® glass substrate 57, a planar waveguide layer 58 of #7059 glass formed on the substrate 57 by sputtering, a clad layer 59 of silicon nitride further formed by plasma CVD process, and trifocal focusing grating couplers 60, 61 and 62 further formed thereon through employment of electron beam direct drawing method and etching technique after application of resist on the clad layer 59. The grating cycle is so designed that the focusing grating coupler 60 at the center excites TM mode, while the focusing grating couplers 61 and 62 at the opposite sides excite TE mode. Light emitted from a semi-conductor laser source 51 is formed into parallel light by a collimating lens 52, and introduced into said focusing grating couplers 60, 61 and 62. The zero-order diffracted light of the reflected light is transmitted through the focusing grating couplers 60, 61 and 62, and collected on the magneto-optical disc D by a condenser lens 53. The reflected light subjected to rotation in a polarizing direction by Kerr effect at the electro-optical disc D is directed in the reverse direction through the condenser lens 53, and formed into waveguide light of TM and TE modes by the focusing grating couplers 60, 61 and 62 so as to be led to the waveguide layer 58, and collected onto photo-detectors 63, 64, 65, 66 and 67 formed on the glass substrate 57. Thus, by calculating the differentiation of outputs of said photo-detectors 63, 64, 65, 66 and 67, the focusing error signal, tracking error signal and reproduction signal are obtained. Since the above discussed waveguide type differential detection device is small in size and light in weight, with dimensions of about 5×12 mm², a very small optical head may be constructed including the semi-conductor laser 51 and lenses 52 and 53. Therefore, the focusing and tracking functions can be executed by moving the entire optical head with an actuator (not shown) based on the above respective signals.

Incidentally, the optical head employing the conventional waveguide type differential detection device as shown in FIG. 1 adopts a push-pull practice for the detection of the tracking error signal, in which deviation of spot is detected by the intensity of ± primary diffracted light produced by the pit Dp or track Dt on the magneto-optical disc D. Accordingly, there is a problem in the case where the magneto-optical disc D is inclined. Once the optical axis of the diffracted light is shifted to produce DC offset diffracted light in the tracking error signal, this results in function instability. Moreover, a similar problem is encountered with respect to the focusing error signal employing the same diffracted light.

Apart from the above, there has also been recently proposed an integrated type optical head as described herein below (as disclosed in Lecture No. 2P-L-15 of the Society of Applied Physics, Fall in 1985, by Ura et al.)

The integrated type optical head as shown in FIG. 2 includes a silicon substrate 31, a buffer layer 32 of SiO₂ formed on the surface of the substrate 31 by a head oxidizing process, a flat plate optical waveguide layer 33 of glass formed on the buffer layer 32 by sputtering, a clad layer of silicon nitride further formed by plasma CVD process, and a focusing grating coupler 34 and two sets of focusing grating beam splitters 35 and 36 further formed through adoption of the electron beam drawing method and etching technique after application of resist on the clad layer.

The light emitted from a semi-conductor laser source 41 is introduced from the side face, into the flat plate optical waveguide layer 33 on the silicon substrate 31 and reaches the two sets of focusing grating beam splitters 35 and 36 as it advances while expanding. The light transmitted through said beam splitters 35 and 36 is altered, in its light path, to a space above the silicon substrate 31 by the coupler 34, and is collected onto the pit Dp on the optical disc D. The reflected light from the optical disc D becomes the waveguide light of the flat plate optical waveguide layer 33 by the focusing grating coupler 34 and is diffracted by the beam splitters 35 and 36. The diffracted light is focused onto photo-detectors 37, 38, 39 and 40 formed on the silicon substrate 31.

The recorded information of the above disc D is read based on the amount of reflected light from the pit Dp. In other words, it may be detected as a sum S of the detection outputs of the photo-detectors 37, 38, 39 and 40. Meanwhile for the detection of the focusing error signal, the so-called Foucault method is employed, and the detection is effected in the manner as described below. When the optical disc D reaches before the focusing point, light receiving amount of the photo-detectors 37 and 39 at the outer side becomes larger than that of the photo-detectors 38 and 40 located at the inner side due to the arrangement of the optical system. Conversely, when the optical disc D comes after the focusing point, the light receiving amount of the inner photo-detectors 38 and 40 becomes larger than that of the photo-detectors 37 and 39. Based on the above fact, the sum of the output of the photo-detector 37 and that of the photo-detector 39 and the sum of the output of the photo-detector 38 and that of the photo-detector 40 are calculated, whereby the focusing error signal FE is detected from the differentiation between the above two sums of the outputs. Meanwhile, for the detection of the tracking error signal, the so-called push-pull practice is employed, and the light receiving amount of the photo-detectors 37 and 38, and that of the photo-detectors 39 and 40 are altered by the deviation in the tracking. Based on this fact, the sum of the outputs of the photo-detectors 39 and 40, and that of the outputs of the photo-detectors 37 and 38 are calculated, and from the differentiation between the above two output sums, the tracking error signal TE is detected.

Owing to the fact that the above silicon substrate 31 is small in size and light in weight with dimensions of 5×12 mm², a very compact optical head can be constructed including the semi-conductor laser source 41. Thus, by moving the whole optical head by an actuator (not shown) based on the focusing error signal and tracking error signal, the focusing and tracking functions may be effected. Furthermore, in order to alleviate factors such as aberration and the like, there has also conventionally been proposed a method in which light emitted from the focusing grating coupler 34 is formed into parallel light so as to be focused on the disc through a condensing lens.

However, the conventional integrated type optical head as shown in FIG. 2 adopts the push-pull practice for detecting deviation of the spot based on the strength of ± primary diffraction light produced by the pit Dp on the optical disc D as a method for detecting the tracking error signal. Therefore, the optical axis of the diffracted light is shifted upon inclination of the optical disc D to produce DC offset in the tracking error signal, thus resulting in function instability. Since the focusing error signal employs the same diffraction light, similar problem is also present therein. Moreover, due to adoption of the end face coupling method for introducing the light emitted from the semi-conductor laser into the optical waveguide layer 33, the coupling efficiency is low, and there is such a disadvantage that the efficiency of the semi-conductor laser light is lowered, with only 10 to 20% of light ray in the emitted laser light becoming the waveguide light, while remaining light ray is undesirably lost.

SUMMARY OF THE INVENTION

Accordingly, an essential object of the present invention is to provide an improved optical information processing apparatus such as an optical disc apparatus and the like having a compact optical head of high performance, and capable of effecting stable focusing function and tracking function at high efficiency, even when an optical disc is inclined.

Another object of the present invention is to provide an optical information processing apparatus of the above described type which is simple in construction and stable in functioning, and can be readily manufactured at low cost.

In accomplishing these and other objects, according to one aspect of the present invention, there is provided an optical information processing apparatus including a substrate of a transparent material, first and second optical waveguides formed on opposite faces of the transparent substrate, light introducing device for introducing reflected light from an information writing medium into the first and second optical waveguides, and a detecting device for detecting a reproduction signal, tracking error signal and focusing error signal based on the reflected light introduced into the first and second optical waveguides.

Furthermore, the optical information processing apparatus of the present invention may be so arranged that said detecting device includes a set of three-division photo-detectors disposed before a focusing point of the reflected light introduced into a first optical waveguide, and another set of three-division photo-detectors disposed after a focusing point of the reflected light introduced into a second optical waveguide, whereby in each of the two sets of three-division photo-detectors, differentiation between light receiving output at its central portion and light receiving outputs at its opposite sides is calculated so as to detect focusing error signal.

By the above arrangement of the present invention, TE mode of the reflected light from the information writing medium is excited by the first light introducing device so as to be introduced into said first optical waveguide, while TM mode of the reflected light is excited by the second light introducing means so as to be introduced into said second optical waveguide. Thus, the reproduction signal, tracking error signal and focusing error signal are detected by the detecting means based on the reflected light introduced into said first optical waveguide, and also, similar signals are detected by the detecting means based on the reflected light introduced into the second optical waveguide, with the reproduction signal, tracking error signal and focusing error signal being calculated from the differentiation of the respective outputs of the detecting means.

Additionally, by calculating the differentiation of the light receiving outputs between the central portion and the opposite side portions with respect to each of the above two sets of three-division detectors, the focusing error signal may be detected through comparison of the above two differentiations.

In another aspect of the present invention, the optical information processing apparatus includes a substrate, an optical waveguide formed on said substrate, light introducing means for introducing light reflected from a recording medium into said optical waveguide to form two collected light rays, a set of three-division photo-detector disposed before a focusing point of the reflected light introduced into said optical waveguide, and another set of three-division photo-detector disposed after a focusing point of the reflected light introduced into said optical waveguide, whereby in each of said two sets of three-division photo-detectors, differentiation between light receiving output at its central portion and a sum of light receiving outputs at its opposite sides is calculated so as to detect focusing error signal through comparison of the differentiation in said two sets of three-division photo-detectors.

In a further aspect of the present invention, the optical information processing apparatus includes a substrate, an optical waveguide formed on said substrate, means for irradiating a plurality of laser light spots onto a recording medium so as to introduce the reflected light into said optical waveguide, and a set of photo-detectors for subjecting to photo-electric conversion, the reflected light introduced into said optical waveguide for each reflected light corresponding to each spot of the plurality of said laser light spots, so as to correspond to the light intensity thereof, whereby detection of tracking error signal being effected through comparison of light receiving outputs of the photo-detectors.

In another aspect of the present invention as referred to above, the light reflected from a recording medium is introduced into said optical waveguide by the light introducing means to form two collected light rays. In each of the set of three-division photo-detectors disposed before the focusing point of the reflected light introduced into said optical waveguide, and the another set of three-division photo-detector disposed after the focusing point of the reflected light introduced into said optical waveguide, the differentiation between the light receiving output at its central portion and a sum of light receiving outputs at its opposite sides is calculated, and thus the focusing error signal is detected by comparing the two differentiations.

In a further aspect of the present invention, the plurality of laser light spots are projected onto the recording medium for introducing the reflected light into said optical waveguide and the reflected light introduced into said optical waveguide is subjected to the photoelectric conversion by the photo-detectors for each reflected light corresponding to each spot of the plurality of said laser light spots, so as to correspond to the light intensity thereof, and thus, the tracking error signal is detected by comparing the light receiving outputs of the photo-detectors.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects and features of the present invention will become apparent from the following description taken in conjunction with the preferred embodiment thereof and with reference to the accompanying drawings, in which;

FIGS. 1 and 2 are schematic perspective views showing arrangements in conventional optical information processing apparatus,

FIG. 3 is a schematic perspective view showing general construction of an optical information processing apparatus according to one preferred embodiment of the present invention,

FIGS. 4A, 4B and 4C are diagrams illustrating light spots on a magneto-optical disc as,

FIGS. 5A and 5B are diagrams showing the state of incidence of reflected light upon three-division photo-detectors in the arrangement of FIG. 3,

FIG. 6 is a graphic illustration explaining differential output of the photo-detectors in the arrangement of FIG. 3,

FIG. 7A is a schematic perspective view of a second embodiment of the information processing apparatus,

FIG. 7B us a top plan view showing, on an enlarged scale, an arrangement of the photo-detectors on a glass Substrate in the embodiment of FIG. 7A,

FIG. 8 is a view similar to FIG. 3, which particularly shows a further embodiment thereof,

FIG. 9 is an electrical block diagram of a signal detection circuit employed in the arrangement of FIG. 8,

FIGS. 10A, 10B and 10C are diagrams for explaining arrangement of light spots on an optical disc,

FIGS. 11A and 11B are diagrams showing state of incidence of reflected light into three-division photo-detectors in the arrangement of FIG. 8, and

FIG. 12, is a graphical diagram for explaining differential output of the three-division photo-detector in the arrangement of FIG. 8.

DETAILED DESCRIPTION OF THE INVENTION

In the description of the present invention like parts are designated by like reference numerals throughout the accompanying drawings.

Referring now to the drawings, there is shown in FIG. 3, an optical information processing apparatus according to one preferred embodiment of the present invention, which includes a transparent substrate 101 of a glass material, e.g. PYREX® glass having a thickness of 1 mm, optical waveguide layers 102 and 103 of #7059 glass each 0.76 μm in thickness and respectively formed on upper and lower faces of the glass substrate 101 by sputtering process, and silicon nitride clad layers 105 and 106 each 0.04 μm in thickness and further formed on the optical waveguide layers 102 and 103 by plasma CVD process. After formation of the above clad layers 105 and 106, a focusing grating coupler 107 for exciting TE mode is formed on the glass substrate 101, while another focusing grating coupler 108 for exciting TM mode is formed on the lower surface of said glass substrate 101 respectively. Positioning on the upper and lower faces of the substrate 101 may be effected at high accuracy through employment of a duplex mask aligner.

The focusing grating couplers 107 and 108 referred to above are manufactured by using a photomask in which a grating pattern prepared by the electron beam drawing process is transferred and also, so arranged that through utilization of the fact that effective refractive indexes of the optical waveguides are different between the TE mode and TM mode, the respective modes are selectively guided by slightly varying the grating cycles to each other.

Light in three beams with a spot interval of 100 μm emitted from a semi-conductor laser 110 disposed below the substrate 101 is formed into parallel light by a collimating lens 111 provided above said semi-conductor laser so as to be incident upon the focusing grating coupler 108. Subsequently, the zero-order diffraction light transmitted through the focusing grating coupler 108 further passes through the focusing grating coupler 107, and thereafter, collected onto the magneto-optical disc 114 by a condenser lens 112 in a state as illustrated in FIG. 4A, in which a main spot is denoted by Numeral 141, sub-spots are represented by Numerals 142 and 143, and a recording track is indicated by Numeral 116.

The reflected light of the main spot 141 subjected to rotation in the polarizing direction by Kerr effect at the magneto-optical disc 114, passes through the condenser lens 112 in the reverse direction, and by the focusing grating couplers 107 and 108, the TE mode becomes the waveguide light of the waveguide layer 102, while the TM mode becomes that of the waveguide layer 103. Thus, light intensity thereof is detected by two sets of three-division photo-detectors 120 and 121 of amorphous silicon formed on the opposite faces of the glass substrate 101. The three-division photo-detector 120 referred to above is disposed in a position after a focal point of the focusing grating coupler 107, while the photo-detector 121 is provided in a position before a focal point of the focusing grating coupler 108 as shown. Reflected light is incident upon the three-division photo-detectors 120 and 121. As illustrated in FIGS. 5A and 5B respectively, lines b denote the case where the focal point of the light spot is located on the optical disc 114. Lines a show the case where the focal point of the light spot is present before the optical disc 114. Lines c represent the case where the focal point of the light spot is in the inner side of the optical disc 114. The differential outputs at the central portions 127 and 132, and at the opposite slides 126 and 128, and 131 and 133 of the above three-division photo-detectors 120 and 121, are respectively obtained as x and y shown in FIG. 3, and are formed in curves as plotted in FIG. 6 with respect to the focal point of the light spot. Since the focusing error signal z which is the differential outputs of x and y, is in the form of an S-shaped curve, it becomes possible to detect the position of the focal point.

Reflected light from the two sub-spots 142 and 143 is incident upon the photo-detectors 124 and 125 for the TE mode, and also upon the photo-detectors 129 and 130 for the TM mode respectively by the focusing grating couplers 107 and 108. The recording track 116 formed on the magneto-optical disc 114 is different in thickness from the substrate 115 by 1/8 wavelength. Therefore, in the case where the main spot 141 is located at the center of the recording track 116 as shown in FIG. 4A, the reflected light rays of the sub-spots 142 and 143 are of the same intensity, but when the main spot 141 is deviated from the center of the recording track 116 as in FIG. 4B, the sub-spots 142 and 143 are made asymmetrical with respect to the center of the recording track 116, thus becoming different in intensity of the reflecting light. Accordingly, the tracking error signal may be detected by taking the differentiation between the photo-detectors 124 and 129, and the photo-detectors 125 and 130. It is to be noted here that the recording track 116 may be either in the form of a line or pit.

As described, in the above described embodiment of the present invention, it is so arranged that the TE mode and TM mode of the reflected light from the magneto-optical disc 114 are respectively excited by the focusing grating couplers 107 and 108 so as to be introduced into the optical waveguides 102 and 103, and such TE mode and TM mode are respectively detected by the set of three-division photo-detector 120 and the photo-detectors 124 and 125, and by the set of three-division photo-detectors 121 and the photo-detector 129 and 130 thereby to calculate the differentiation thereof, and therefore, there is no possibility that any offset is produced with respect tot the inclination of the magneto-optical disc 114. Accordingly, stable focusing and tracking functions may be effected for writing, recording and reproduction of the magneto-optical disc device at high accuracy.

It should be noted here that, in the foregoing embodiment, although the focal distances of the focusing grating couplers 107 and 108 are adapted to be equal to each other, and the three-division photo-detectors 120 is disposed after the focal point, with the three-division photo-detectors 121 being provided before said focal point, the arrangement may be modified, for example, in such a manner that, as shown in FIG. 7A, with the focal distances of the focusing grating couplers 107 and 108 being made different from each other. And Si substrate 180 on which two sets of three-division photo detectors 120' and 121', and photo-detectors 124' and 125' and 12' and 130' are formed as illustrated in FIG. 7B, may be disposed in the vicinity of the end face of the glass substrate 101. The three-division photo-detectors 120' and 121', and the photo-detectors 124', 125', 129', and 130' are constituted by a PIN diode array, and functioning principle thereof is the same as that in the foregoing embodiment. Moreover, it may be so modified that the above Si substrate 180 is spaced from the end face of the glass substrate 101, and each reflected light ray from the glass substrate 101 is adapted to be incident upon the above PIN diode array through a lens means.

The magneto-optical device employed in the above embodiment may be replaced by other disc devices not utilizing the Kerr effect, e.g. optical disc devices for compact discs, video discs, or additionally-writing type discs, etc.

Furthermore, in the foregoing embodiment, although the semi-conductor laser of three beam type is employed, it may be so modified that light emitted from one beam semiconductor laser is divided into diffraction light of zero order and ± first order to be used for the purpose.

Similarly, in the above embodiment, although the focusing grating couplers 107 and 108 are arranged to selectively guide the TE mode and TM mode by slightly altering the grating cycle to each other, the arrangement may also be so modified that the same grating pattern may be used respectively for the TE mode and TM mode by slightly changing the layer thickness of the optical waveguide layers 102 and 103.

Meanwhile, the focusing grating coupler described as employed in the foregoing embodiment may be replaced by a grating coupler and a waveguide lens means.

Moreover, either one in each set of the photo-detectors 124 and 125, 129 and 130, 124' and 125', or 129' and 130' may be abbreviated for simplification of the construction.

As is seen from the foregoing description, the optical information processing apparatus according to the first embodiment of the present invention is so arranged that light reflected from the information writing medium is introduced by the light introducing means, into the first and second optical waveguides formed on the opposite sides of the transparent substrate, thereby to detect the reproduction signal, tracking error signal, and focusing error signal by detecting means based on the reflected light introduced into said optical waveguides, and therefore, it is possible to effect stable focusing function and tracking function even when the above information writing medium is inclined, while the optical head may be made compact in size at high performance.

Furthermore, by the arrangement that the above detecting means includes a set of three-division photo detectors disposed before the focal point of the reflected light introduced into said first optical waveguide, and another set of three-division photo-detectors provided after the focal point of the reflected light introduced into the second optical waveguide, whereby the differentiation of the light receiving outputs between the central portion and opposite end portions is calculated with respect to each of the above two sets of photo-detectors so as to detect the focusing error signal through comparison of the above two differentiations, the focusing function can be made still more stable.

Reference is further made to FIG. 8 showing an optical information processing device according to a second embodiment of the present invention. In FIG. 8, the processing device includes a transparent substrate 201 of PYREX® glass having a thickness of 1 mm, a planar plate optical waveguide layer 202 of #7059 glass 0.76 μm in thickness and formed on the glass substrate 201 by sputtering process, and a silicon nitride clad layer further formed on the optical waveguide layer 202 by plasma CVD process. After further application of a resist layer thereon, a focusing grating coupler 203 and a grating beam splitter 205 are formed through utilization of the electron beam direct drawing method and etching technique. Furthermore, on the glass substrate 201, two sets of three-division photo-detectors 206 and 207 and photo-detectors 208 and 209 are formed through vapor deposition.

Light in three beams with a spot interval of 100 μm emitted from a semi-conductor laser 211 disposed below the substrate 201 is formed into parallel light by a collimating lens 212 provided above said semi-conductor laser so as to be incident upon the focusing grating coupler 203. Subsequently, the zero-order diffraction light transmitted through the focusing grating coupler 203 forms a main spot 221 and sub-spots 222 and 223 on the optical disc 214 by a condenser lens 213 in the state as illustrated in FIGS. 10A, 10B and 10C.

The reflected light rays of the above discussed respective spots pass through the condenser lens 213 in the reverse direction so as to be the guide light of the optical waveguide layer 202 by the focusing grating coupler 203, and advance towards the photo-detectors 208, 209 and 262 as the focusing light. The reflected light from the main spot 221, i.e. the light ray advancing to the photo-detector 262 is incident upon the three-division photo-detectors 261, 262 and 263 disposed before the focusing point. Meanwhile, half of the light ray changed in its optical path by the grating beam splitter 205 formed in the course of the light path of the ray directed to the photo-detector 262, is incident upon the three-division photo-detectors 271, and 273 disposed after the focusing point thereof.

In the case where the optical disc 214 is present at the focal point of the main spot 221, the reflected light rays from the optical disc 214 are incident upon the three-division photo-detectors 261, 262, and 263, and 271, 272 and 273 as shown by lines b in FIGS. 11A and 11B. Meanwhile, when the optical disc 214 is located behind the focal point of the main spot 221, the reflected light rays are incident as shown by lines a in FIGS. 11A and 11B, while when the optical disc 214 is located before the focal point of the main spot 221, the reflected light rays are incident as shown by lines C in FIGS. 11A and 11B. Accordingly, the differential outputs between the central portions 262 and 272, and opposite side portions 261, 263 and 271 and 273 of the three-division photo-detectors 206 and 207 as shown in by x and y in a block diagram of the signal detection circuit in FIG. 9 are respectively represented by curves as shown in FIG. 12 with respect to the disc position. The focusing error signal FE which is the differential output of x and y referred to above is represented by the S-shaped curve as shown by z in FIG. 12, thus making it possible to detect the focal point position.

Subsequently, the tracking error signal is detected as follows.

The pit 215 (FIG. 8) formed on the disc 214 is different in thickness from the substrate 216 by λ/4 (where λ: wavelength). Therefore, in the case where the main spot 221 is located at the center of the track as shown in FIG. 10A, the reflected light rays from the two sub-spots 222 and 223 are of the same intensity, but when the main spot 221 is deviated from the center of the track as in FIGS. 10B and 10C, the two sub-spots 222 and 223 become asymmetrical with respect to the center of the track for different reflection light density. Accordingly, by taking the differentiation of the photo-detectors 208 and 209 as shown in FIG. 9, the tracking error signal TE may be detected.

It is to be noted here that the recording signal S is selected as shown in FIG. 9 by receiving the reflected light from the main spot 221.

As described above, since the incident light from the semi-conductor laser 211 is arranged to be projected onto the optical disc 214 without being introduced into the optical waveguide layer 202, efficiency for utilizing the semi-conductor laser light may be improved.

Moreover, owing to the arrangement that the reflected light from the optical disc 214 is introduced into the optical waveguide layer 202 by the grating coupler 203, and the differentiation of the light receiving output between the central portion and the opposite side portions is calculated with respect to each of the three-division photo-detector 206 disposed before the focal point of the reflected light, and the three-division photo-detector 207 disposed behind the focal point of the light ray altered in its light path by the grating beam splitter 205 formed in the course of the reflected light, thereby to detect the focusing error signal through comparison of the above two differentiations, there is no possibility to produce offset with respect to the inclination of the optical disc 214, and thus, stable focusing function may be effected.

Furthermore, since it is so arranged that the main spot 221 and sub-spots 222 and 223 are formed on the optical disc 214, and the reflected light rays therefrom are introduced into the optical waveguide layer 202 for subsequent reception by the photo-detectors 208 and 209 to obtain the differentiation of light receiving outputs of said photo-detectors 208 and 209, thereby to detect the tracking error signal, no offset is produced with respect to the inclination of the optical disc 214. Therefore, stable tracking function can also be effected.

It should be noted here that, in the foregoing embodiment, although the three beam semi-conductor laser is employed, this may be replaced by a one beam semi-conductor laser whose emitted light ray is divided into diffraction light of zero order and ± first order through a diffraction grating.

As is clear from the above description, the optical information processing apparatus according to the second embodiment of the present invention includes the optical waveguide formed on the substrate, the light introducing means for introducing light reflected from the recording medium into said optical waveguide to form two collected light rays, the set of three-division photo-detectors disposed before the focusing point of the reflected light introduced into said optical waveguide, whereby in each of said two sets of three-division photo-detectors, differentiation between light receiving output at its central portion and a sum of light receiving outputs at its opposite sides is calculated so as to detect focusing error signal through comparison of the differentiations in said two sets of three-division photo-detectors, and therefore, stable focusing function may be effected without forming undesirable offset phenomenon.

Furthermore, since the optical information processing apparatus according to the modification of the second embodiment includes the optical waveguide formed on the substrate means for irradiating a plurality of laser light spots onto the recording medium so as to introduce the reflected light into the optical waveguide, and the set of photo-detectors for subjecting to photo-electric conversion, the reflected light introduced into said optical waveguide for each reflected light corresponding to each spot of the plurality of the laser light spots, so as to correspond to the light intensity thereof, whereby detection of tracking error signal is effected through comparison of light receiving outputs of the photo-detectors, stable tracking function may also be achieved without giving rise to offset phenomenon.

Although the present invention has been fully described by way of example with reference to the accompanying drawings, it is to be noted here that various changes and modifications will be apparent to those skilled in the art. Therefore, unless otherwise such changes and modifications depart from the scope of the present invention, they should be construed as included therein. 

What is claimed is:
 1. An optical information processing apparatus comprising:a substrate; means for projecting a plurality of laser light sports onto a recording medium; optical waveguide means formed on said substrate for receiving and for dividing laser light spots reflected from said recording medium into two sets of reflected light; photo-detector means for producing a tracking error signal from a comparison of the light intensity of each of said sets of reflected light.
 2. An optical information processing apparatus as recited in claim 1, wherein said optical waveguide means further comprises two optical waveguides disposed in a parallel relationship to each other, with the reflected laser spots being introduced respectively into said two optical waveguides so as to be divided into said two sets of reflected light.
 3. An optical information processing apparatus as recited in claim 1, wherein said photo-detector means is formed on the substrate with said optical waveguide means.
 4. An optical information processing apparatus as recited in claim 1, wherein said photo-detector means is positioned outside the substrate formed with said optical waveguide means. 